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GO TipTilt HV 15N

GO-TIPTILTHV-15N

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The PRECIBEO GO TipTilt HV stage moves loads of up to 2,5 kg with nanometer precision along the Z-axis, as well as around the X-axis and the Y-axis, in down to 10-4 Pa vacuum.

Technical Specifications
ParameterSpecification
Travel (Z)+-10 mm
Travel Θ(X, Y)+- 9°
Minimum Incremental Motion (Z)2 nm
Minimum Incremental Motion Θ(X, Y)< 0,1 µrad
Repeatability (Z)+- 200 nm
Repeatability Θ(Z)+- 15 µrad
Maximum Operating Force (Push/Pull)(Z) 15 N (min.)
Holding Force (When Power Is Off)(Z) 18 N (min.)
Maximum Speed At No Load (Z)8 mm/s
Maximum Speed With Max Load On Top Plate (Z)5 mm/s (min.)
Base ModulePRECIBEO GO Linear Stage 4545
Maximum Load Centered on Top1 kg
Diameter150 mm
Height92 mm
Vacuum Side Cables3 pcs of 1 m cable (+-5%) with f. D9SUB connector
Air Side Cables3 pcs of 2 m cable (+-5%) with f. D9SUB & ix Industrial™ connectors
MaterialAluminum
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GO-TIPTILTHV-15N

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