GO XYR HV 16N

GO-XYRHV-16N

Description
Specifications

The PRECIBEO GO XYR HV stage moves loads of up to 10 kg with nanometer precision along the X- and Y-axis, as well as around the Z-axis, in down to 10-4 Pa vacuum.

Technical Specifications

Parameter	Specification
Travel (X, Y)	+-10 mm
Travel Θ(Z)	+- 10°
Minimum Incremental Motion (X, Y)	2 nm
Minimum Incremental Motion Θ(Z)	< 0,1 µrad
Repeatability (X, Y)	+- 200 nm
Maximum Operating Force (Push/Pull)	(X) 20 N / (Y) 16 N (min.)
Holding Force (When Power Is Off)	(X) 24 N / (Y) 20 N (min.)
Maximum Speed At No Load	8 mm/s
Maximum Speed At Max Push / Pull Force	1 mm/s (min.)
Base Module	PRECIBEO GO Linear Stage LS4545
Maximum Load Centered on Top	10 kg
Diameter	165 mm
Height	73,5 mm
Vacuum Side Cables	3 pcs of 1 m cable (+-5%) with f. D9SUB connector
Air Side Cables	3 pcs of 2 m cable (+-5%) with f. D9SUB & ix Industrial™ connectors
Material	Aluminum